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Treasure of the Past VII: Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry

Published

Author(s)

F L. McCrackin, E Passaglia, R R. Stromberg, H L. Steinberg
Citation
Journal of Research (NIST JRES) -
Volume
106 No. 3

Keywords

barium fluoride films, ellipsometer

Citation

McCrackin, F. , Passaglia, E. , Stromberg, R. and Steinberg, H. (2001), Treasure of the Past VII: Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 23, 2024)
Created May 1, 2001, Updated February 17, 2017