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Transmission Electron Microscopy Investigation of Titanium Silicide Thin Films

Published

Author(s)

Alline F. Myers, Eric B. Steel, L M. Struck, H I. Liu, J A. Burns
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Location
PA
Conference Title
Proceedings of Characterization and Metrology for ULSI Technology

Citation

Myers, A. , Steel, E. , Struck, L. , Liu, H. and Burns, J. (1998), Transmission Electron Microscopy Investigation of Titanium Silicide Thin Films, Characterization and Metrology for ULSI Technology, PA (Accessed April 15, 2024)
Created December 1, 1998, Updated February 17, 2017