@conference{146266,
  author = {Alline Myers and Eric Steel and L Struck and H Liu and J Burns},
  title = {Transmission Electron Microscopy Investigation of Titanium Silicide Thin Films},
  year = {1998},
  month = {1998-12-01},
  publisher = {Characterization and Metrology for ULSI Technology, PA},
  language = {en},
}