TY  - CONF
AU  - Alline Myers
AU  - Eric Steel
AU  - L Struck
AU  - H Liu
AU  - J Burns
C2  - Characterization and Metrology for ULSI Technology, PA
DA  - 1998-12-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology, PA
PY  - 1998
TI  - Transmission Electron Microscopy Investigation of Titanium Silicide Thin Films
ER  -