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Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment

Published

Author(s)

Roy H. Geiss, Robert R. Keller, David T. Read

Abstract

We describe a new scanning electron microscope (SEM) method for obtaining and analyzing the crystallographic structure and orientation in nanoparticles and ultrathin films using conventional electron backscatter diffraction (EBSD) equipment.
Proceedings Title
Microscopy and Microanalysis 2010 Proceedings
Conference Dates
August 1-5, 2010
Conference Location
Portland, OR
Conference Title
Microscopy and Microanalysis 2010

Keywords

EBSD, SEM, nanoparticles, thin films, transmission electron diffraction

Citation

Geiss, R. , Keller, R. and Read, D. (2010), Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment, Microscopy and Microanalysis 2010 Proceedings, Portland, OR (Accessed June 17, 2024)

Issues

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Created January 1, 2010, Updated February 19, 2017