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Tin Oxide Gas Sensor Fabricated Using CMOS Micro-Hotplates and In-Situ Processing

Published

Author(s)

John S. Suehle, Richard E. Cavicchi, Michael Gaitan, Stephen Semancik
Citation
IEEE Electron Device Letters

Citation

Suehle, J. , Cavicchi, R. , Gaitan, M. and Semancik, S. (1993), Tin Oxide Gas Sensor Fabricated Using CMOS Micro-Hotplates and In-Situ Processing, IEEE Electron Device Letters, [online], https://doi.org/10.1109/55.215130, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26461 (Accessed February 26, 2024)
Created January 19, 1993, Updated October 12, 2021