TY  - JOUR
AU  - John Suehle
AU  - Richard Cavicchi
AU  - Michael Gaitan
AU  - Stephen Semancik
C2  - IEEE Electron Device Letters
DA  - 1993-01-20 00:01:00
DO  - https://doi.org/10.1109/55.215130
LA  - en
PB  - IEEE Electron Device Letters
PY  - 1993
TI  - Tin Oxide Gas Sensor Fabricated Using CMOS Micro-Hotplates and In-Situ Processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26461
ER  -