@article{767821,
  author = {John Suehle and Richard Cavicchi and Michael Gaitan and Stephen Semancik},
  title = {Tin Oxide Gas Sensor Fabricated Using CMOS Micro-Hotplates and In-Situ Processing},
  year = {1993},
  month = {1993-01-20 00:01:00},
  publisher = {IEEE Electron Device Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26461},
  doi = {https://doi.org/10.1109/55.215130},
  language = {en},
}