Nguyen, N.
and Richter, C.
(1997),
Thickness Determination of Ultra-Thin SiO<sub>2</sub> Films on Si by Spectroscopic Ellipsometry, Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA
(Accessed April 26, 2024)
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Thickness Determination of Ultra-Thin SiO2 Films on Si by Spectroscopic Ellipsometry
Published
Author(s)
,
Proceedings Title
Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Volume
97-10
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA
Pub Type
Conferences
Citation
Created December 30, 1997, Updated October 12, 2021