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Thickness Determination of Ultra-Thin SiO2 Films on Si by Spectroscopic Ellipsometry

Published

Author(s)

Nhan Van Nguyen, Curt A. Richter
Proceedings Title
Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Volume
97-10
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA

Citation

Nguyen, N. and Richter, C. (1997), Thickness Determination of Ultra-Thin SiO<sub>2</sub> Films on Si by Spectroscopic Ellipsometry, Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA (Accessed June 23, 2024)

Issues

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Created December 30, 1997, Updated October 12, 2021