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Thickness Determination of Ultra-Thin SiO2 Films on Si by Spectroscopic Ellipsometry
Published
Author(s)
Nhan Van Nguyen, Curt A. Richter
Proceedings Title
Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Volume
97-10
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA
Pub Type
Conferences
Citation
Nguyen, N.
and Richter, C.
(1997),
Thickness Determination of Ultra-Thin SiO<sub>2</sub> Films on Si by Spectroscopic Ellipsometry, Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA
(Accessed October 9, 2025)