TY  - CONF
AU  - Nhan Nguyen
AU  - Curt Richter
C2  - Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA
DA  - 1997-12-31 00:12:00
LA  - en
M1  - 97-10
PB  - Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA
PY  - 1997
TI  - Thickness Determination of Ultra-Thin SiO<sub>2</sub> Films on Si by Spectroscopic Ellipsometry
ER  -