@conference{776511,
  author = {Nhan Nguyen and Curt Richter},
  title = {Thickness Determination of Ultra-Thin SiO<sub>2</sub> Films on Si by Spectroscopic Ellipsometry},
  year = {1997},
  number = {97-10},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., ECS Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Montreal, 1, CA},
  language = {en},
}