Chiang, C.
, Wallace, W.
, Lynn, G.
, Feiler, D.
and Xia, W.
(2000),
Thermally Induced Stress Relaxation and Densification of Spin-on-Glass Thin Films, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851605
(Accessed December 14, 2024)