@article{838731,
  author = {C. Chiang and William Wallace and G Lynn and D Feiler and W. Xia},
  title = {Thermally Induced Stress Relaxation and Densification of Spin-on-Glass Thin Films},
  year = {2000},
  number = {76},
  month = {2000-01-01 00:01:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851605},
  language = {en},
}