TY - JOUR AU - C. Chiang AU - William Wallace AU - G Lynn AU - D Feiler AU - W. Xia C2 - Applied Physics Letters DA - 2000-01-01 00:01:00 LA - en M1 - 76 PB - Applied Physics Letters PY - 2000 TI - Thermally Induced Stress Relaxation and Densification of Spin-on-Glass Thin Films UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851605 ER -