Orji, N.
, Dixson, R.
, Itoh, H.
and Wang, C.
(2014),
Technique for AFM Tip Characterization, SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173, San Diego, CA
(Accessed April 20, 2024)
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Technique for AFM Tip Characterization
Published
Author(s)
, , Hiroshi Itoh, Chumei Wang
Abstract
In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from current tip characterizer.Proceedings Title
SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173
Conference Dates
August 17-22, 2014
Conference Location
San Diego, CA
Conference Title
SPIE Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
Pub Type
Conferences
Keywords
critical dimension AFM, tip characterizer
Citation
Created September 15, 2014, Updated February 19, 2017