Ndubuisi G. Orji, Ronald G. Dixson, Hiroshi Itoh, Chumei Wang
In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from current tip characterizer.
SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173
August 17-22, 2014
San Diego, CA
SPIE Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
, Dixson, R.
, Itoh, H.
and Wang, C.
Technique for AFM Tip Characterization, SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173, San Diego, CA
(Accessed June 9, 2023)