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Technique for AFM Tip Characterization

Published

Author(s)

Ndubuisi G. Orji, Ronald G. Dixson, Hiroshi Itoh, Chumei Wang

Abstract

In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from current tip characterizer.
Proceedings Title
SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173
Conference Dates
August 17-22, 2014
Conference Location
San Diego, CA
Conference Title
SPIE Instrumentation, Metrology, and Standards for Nanomanufacturing VIII

Keywords

critical dimension AFM, tip characterizer

Citation

Orji, N. , Dixson, R. , Itoh, H. and Wang, C. (2014), Technique for AFM Tip Characterization, SPIE Proc. Instrumentation, Metrology, and Standards for Nanomanufacturing Vol. 9173, San Diego, CA (Accessed April 19, 2024)
Created September 15, 2014, Updated February 19, 2017