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Superconformal Film Growth: Mechanism and Quantification

Published

Author(s)

T P. Moffat, D Wheeler, Monica D. Edelstein, D Josell
Citation
Ibm Journal of Research and Development
Volume
49
Issue
1

Citation

Moffat, T. , Wheeler, D. , Edelstein, M. and Josell, D. (2005), Superconformal Film Growth: Mechanism and Quantification, Ibm Journal of Research and Development (Accessed March 28, 2024)
Created December 31, 2004, Updated October 12, 2021