Moffat, T.
, Wheeler, D.
, Edelstein, M.
and Josell, D.
(2005),
Superconformal Film Growth: Mechanism and Quantification, Ibm Journal of Research and Development
(Accessed December 4, 2023)
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Superconformal Film Growth: Mechanism and Quantification
Published
Author(s)
T P. Moffat, D Wheeler, , D Josell
Citation
Ibm Journal of Research and Development
Volume
49
Issue
1
Pub Type
Journals
Citation
Created December 31, 2004, Updated October 12, 2021