@article{754151,
  author = {T Moffat and D Wheeler and Monica Edelstein and D Josell},
  title = {Superconformal Film Growth: Mechanism and Quantification},
  year = {2005},
  number = {49},
  month = {2005-01-01 00:01:00},
  publisher = {Ibm Journal of Research and Development},
  language = {en},
}