TY  - JOUR
AU  - T Moffat
AU  - D Wheeler
AU  - Monica Edelstein
AU  - D Josell
C2  - Ibm Journal of Research and Development
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 49
PB  - Ibm Journal of Research and Development
PY  - 2005
TI  - Superconformal Film Growth: Mechanism and Quantification
ER  -