Frigo, S.
, Levine, Z.
and Zaluzec, N.
(2002),
Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy, Applied Physics Letters
(Accessed May 28, 2023)
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Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy
Published
Author(s)
S P. Frigo, , N J. Zaluzec
Citation
Applied Physics Letters
Volume
81
Pub Type
Journals
Citation
Created December 31, 2001, Updated October 12, 2021