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Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy

Published

Author(s)

S P. Frigo, Zachary H. Levine, N J. Zaluzec
Citation
Applied Physics Letters
Volume
81

Citation

Frigo, S. , Levine, Z. and Zaluzec, N. (2002), Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy, Applied Physics Letters (Accessed April 13, 2024)
Created December 31, 2001, Updated October 12, 2021