Frigo, S.
, Levine, Z.
and Zaluzec, N.
(2002),
Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy, Applied Physics Letters
(Accessed July 4, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy
Published
Author(s)
S P. Frigo, , N J. Zaluzec
Citation
Applied Physics Letters
Volume
81
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 31, 2001, Updated October 12, 2021