TY  - JOUR
AU  - S Frigo
AU  - Zachary Levine
AU  - N Zaluzec
C2  - Applied Physics Letters
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 81
PB  - Applied Physics Letters
PY  - 2002
TI  - Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy
ER  -