@article{834001,
  author = {S Frigo and Zachary Levine and N Zaluzec},
  title = {Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy},
  year = {2002},
  number = {81},
  month = {2002-01-01 00:01:00},
  publisher = {Applied Physics Letters},
  language = {en},
}