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Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy

Published

Author(s)

Michael T. Postek
Citation
Journal of Research (NIST JRES) -

Citation

Postek, M. (1987), Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 21, 2024)

Issues

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Created June 30, 1987, Updated February 17, 2017