Postek, M.
(1987),
Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed September 29, 2023)
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Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy
Published
Author(s)
Citation
Journal of Research (NIST JRES) -
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created June 30, 1987, Updated February 17, 2017