Postek, M.
(1987),
Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed January 22, 2026)
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Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy
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Journal of Research (NIST JRES) -
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Created June 30, 1987, Updated February 17, 2017