TY  - GEN
AU  - Michael Postek
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1987-06-30
LA  - en
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1987
TI  - Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy
ER  -