Gaitan, M.
and Takacs, M.
(2008),
The State of Standards: MEMS, Small Times, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32955
(Accessed October 14, 2024)
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The State of Standards: MEMS
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Author(s)
, Monica Takacs
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Small Times
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Others
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Created January 1, 2008, Updated February 19, 2017