TY  - VIDEO
AU  - Michael Gaitan
AU  - Monica Takacs
C2  - Small Times
DA  - 2008-01-01
LA  - en
PB  - Small Times
PY  - 2008
TI  - The State of Standards: MEMS
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32955
ER  -