@misc{110961,
  author = {Michael Gaitan and Monica Takacs},
  title = {The State of Standards: MEMS},
  year = {2008},
  month = {2008-01-01},
  publisher = {Small Times},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32955},
  language = {en},
}