Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

A Standard Method for Measuring Wafer Bond Strength for MEMS Applications



Richard A. Allen, Janet M. Cassard, Winthrop A. Baylies, David T. Read, George D. Quinn, Frank W. DelRio, Kevin T. Turner, Michael Bernasch, Joerg Bagdahn


A round robin, to provide precision and bias data for SEMI standard MS5-1107, Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures, in underway. The precision and bias data, combined with experience in applying the test instructions included in MS5-1107, will provide the basis for an updated version of MS5. Measurements at the pilot lab have been completed and the round robin is on-going at six additional laboratories.
Conference Dates
October 12-18, 2008
Conference Location
Honolulu, HI
Conference Title
Proc. ECS: E11 - Semiconductor Wafer Bonding 10: Science, Technology, and Applications


micro-chevron, wafer bond strength measurement, SEMI MS5
Created December 23, 2008, Updated February 19, 2017