@conference{129506,
  author = {Richard Allen and Janet Cassard and Winthrop Baylies and David Read and George Quinn and Frank DelRio and Kevin Turner and Michael Bernasch and Joerg Bagdahn},
  title = {A Standard Method for Measuring Wafer Bond Strength for MEMS Applications},
  year = {2008},
  number = {16},
  month = {2008-12-23},
  publisher = {Proc. ECS: E11 - Semiconductor Wafer Bonding 10: Science, Technology, and Applications, Honolulu, HI},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33132},
  language = {en},
}