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Smart pyrometry for combined sample temperature and reflectance measurements in molecular beam epitaxy

Published

Author(s)

Kristine A. Bertness

Abstract

Improved sample temperature measurement accuracy is demonstrated in a normal-incidence optical reflectance spectroscopy system that has been modified to allow rapid switching between the measurement of sample reflectance and sample emission.
Proceedings Title
Proc. 18th North American Conf. on Molecular Beam Epitaxy (NAMBE 99)
Issue
11 2124-2130
Conference Dates
October 10-15, 1999
Conference Location
Banff

Keywords

in situ reflectance, molecular beam epitaxy, pyrometry, temperature measurement

Citation

Bertness, K. (2000), Smart pyrometry for combined sample temperature and reflectance measurements in molecular beam epitaxy, Proc. 18th North American Conf. on Molecular Beam Epitaxy (NAMBE 99), Banff, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=6488 (Accessed May 26, 2024)

Issues

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Created June 1, 2000, Updated January 27, 2020