Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Simulations of Optical Microscope Images, ed. by C.N. Archie

Published

Author(s)

Thomas A. Germer, E Marx
Citation
Metrology Inspection and Process Control for Microlithography XX
Volume
S

Citation

Germer, T. and Marx, E. (2006), Simulations of Optical Microscope Images, ed. by C.N. Archie, Metrology Inspection and Process Control for Microlithography XX (Accessed April 19, 2024)
Created January 1, 2006, Updated February 17, 2017