@article{125626,
  author = {Thomas Germer and E Marx},
  title = {Simulations of Optical Microscope Images, ed. by C.N. Archie},
  year = {2006},
  number = {S},
  month = {2006-01-01},
  publisher = {Metrology Inspection and Process Control for Microlithography XX},
  language = {en},
}