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A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY

Published

Author(s)

Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
Proceedings Title
Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop
Conference Dates
June 3-7, 2018
Conference Location
Hilton Head, SC, US

Citation

Bao, Y. , Zhou, F. , LeBrun, T. and Gorman, J. (2018), A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY, Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US (Accessed August 16, 2022)
Created June 2, 2018, Updated October 12, 2021