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A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY

Published

Author(s)

Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
Proceedings Title
Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop
Conference Dates
June 3-7, 2018
Conference Location
Hilton Head, SC
Created June 3, 2018, Updated September 20, 2018