Bao, Y.
, Zhou, F.
, LeBrun, T.
and Gorman, J.
(2018),
A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY, Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US
(Accessed September 24, 2023)
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A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY
Published
Author(s)
, , ,
Proceedings Title
Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop
Conference Dates
June 3-7, 2018
Conference Location
Hilton Head, SC, US
Pub Type
Conferences
Citation
Created June 2, 2018, Updated October 12, 2021