@conference{808206,
  author = {Yiliang Bao and Feng Zhou and Thomas LeBrun and Jason Gorman},
  title = {A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY},
  year = {2018},
  month = {2018-06-03 00:06:00},
  publisher = {Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US},
  language = {en},
}