TY  - CONF
AU  - Yiliang Bao
AU  - Feng Zhou
AU  - Thomas LeBrun
AU  - Jason Gorman
C2  - Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US
DA  - 2018-06-03 00:06:00
LA  - en
PB  - Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US
PY  - 2018
TI  - A SILICON OPTOMECHANICAL ACCELEROMETER WITH HIGH BANDWIDTH AND SENSITIVITY
ER  -