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Silicon Nanowire NVM with High-k Gate Dielectric Stack

Published

Author(s)

Xiaoxiao Zhu, D. Gu, Qiliang Li, D. Ioannoua, H. Baumgart, John S. Suehle, Curt A. Richter
Citation
Microelectronic Engineering
Volume
86
Issue
7-9

Citation

Zhu, X. , Gu, D. , Li, Q. , Ioannoua, D. , Baumgart, H. , Suehle, J. and Richter, C. (2009), Silicon Nanowire NVM with High-k Gate Dielectric Stack, Microelectronic Engineering (Accessed March 1, 2024)
Created September 1, 2009, Updated February 19, 2017