TY - JOUR AU - Xiaoxiao Zhu AU - D. Gu AU - Qiliang Li AU - D. Ioannoua AU - H. Baumgart AU - John Suehle AU - Curt Richter C2 - Microelectronic Engineering DA - 2009-09-01 LA - en M1 - 86 PB - Microelectronic Engineering PY - 2009 TI - Silicon Nanowire NVM with High-k Gate Dielectric Stack ER -