Villarrubia, J.
, VladaÌr, A.
and Postek, M.
(2004),
Shape-sensitive linewidth measurements of resist structures::LITG410I project, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7089
(Accessed March 13, 2025)
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Shape-sensitive linewidth measurements of resist structures::LITG410I project
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- NIST IR 7089
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NIST IR 7089
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Created January 1, 2004, Updated May 20, 2023