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Shape-sensitive linewidth measurements of resist structures::LITG410I project

Published

Author(s)

John S Villarrubia, András Vladár, Michale T Postek
Citation
- NIST IR 7089
Report Number
NIST IR 7089

Citation

Villarrubia, J. , Vladár, A. and Postek, M. (2004), Shape-sensitive linewidth measurements of resist structures::LITG410I project, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7089 (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2004, Updated May 20, 2023