TY  - GEN
AU  - John S Villarrubia
AU  - András Vladár
AU  - Michale T Postek
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7089
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Shape-sensitive linewidth measurements of resist structures::LITG410I project
ER  -