@misc{misc,
  author = {John S Villarrubia and Andra{\`I}s Vlada{\`I}r and Michale T Postek},
  title = {Shape-sensitive linewidth measurements of resist structures::LITG410I project},
  year = {2004},
  month = {2004-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7089},
  language = {en},
}