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PUBLICATIONS

Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses

Published

Author(s)

Jay F. Marchiando, Jon Geist
Citation
Applied Optics
Volume
31
Issue
4
Pub Type
Journals

Citation

Marchiando, J. and Geist, J. (1992), Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses, Applied Optics (Accessed October 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 31, 1992, Updated October 12, 2021
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