Marchiando, J.
and Geist, J.
(1992),
Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses, Applied Optics
(Accessed January 25, 2025)
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Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses
Published
Author(s)
,
Citation
Applied Optics
Volume
31
Issue
4
Pub Type
Journals
Citation
Issues
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Created January 31, 1992, Updated October 12, 2021