@article{779376,
  author = {Jay Marchiando and Jon Geist},
  title = {Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses},
  year = {1992},
  number = {31},
  month = {1992-02-01 00:02:00},
  publisher = {Applied Optics},
  language = {en},
}