TY  - JOUR
AU  - Jay Marchiando
AU  - Jon Geist
C2  - Applied Optics
DA  - 1992-02-01 00:02:00
LA  - en
M1  - 31
PB  - Applied Optics
PY  - 1992
TI  - Separation by Ion Implantation of Oxygen (SIMOX) Structures: Estimating Thicknesses
ER  -