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Sensitivity of Ellipsometric Modeling to the

Published

Author(s)

Deane Chandler-Horowitz, Jay F. Marchiando, M. G. Doss, S. J. Krause, S. Visitserngtrakul
Proceedings Title
Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference
Conference Dates
October 2-4, 1990
Conference Location
Key West, FL, USA
Conference Title
1990 IEEE SOS/SOI Technology Conference

Citation

Chandler-Horowitz, D. , Marchiando, J. , Doss, M. , Krause, S. and Visitserngtrakul, S. (1990), Sensitivity of Ellipsometric Modeling to the, Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA (Accessed April 20, 2024)
Created October 30, 1990, Updated October 12, 2021