@conference{766096,
  author = {Deane Chandler-Horowitz and Jay Marchiando and M. Doss and S. Krause and S. Visitserngtrakul},
  title = {Sensitivity of Ellipsometric Modeling to the},
  year = {1990},
  month = {1990-10-31 00:10:00},
  publisher = {Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA},
  language = {en},
}