TY  - CONF
AU  - Deane Chandler-Horowitz
AU  - Jay Marchiando
AU  - M. Doss
AU  - S. Krause
AU  - S. Visitserngtrakul
C2  - Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
DA  - 1990-10-31 00:10:00
LA  - en
PB  - Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
PY  - 1990
TI  - Sensitivity of Ellipsometric Modeling to the
ER  -