Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Semiconductor Microelectronics and Naoelectronics Programs



Stephen Knight, Joaquin (. Martinez, Michele L. Buckley


The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology, NIST, in fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
NIST Interagency/Internal Report (NISTIR) - NISTIR7235
Report Number


interconnect and packaging, lithography, microelectronics, modeling, semiconductor, thin film, wafer characterization


Knight, S. , Martinez, J. and Buckley, M. (2005), Semiconductor Microelectronics and Naoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online],, (Accessed May 30, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created June 30, 2005, Updated October 12, 2021