@misc{754176,
  author = {Stephen Knight and Joaquin Martinez and Michele Buckley},
  title = {Semiconductor Microelectronics and Naoelectronics Programs},
  year = {2005},
  month = {2005-07-01 00:07:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32023},
  doi = {https://doi.org/10.6028/NIST.ir.7235},
  language = {en},
}