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Semiconductor Microelectronics and Nanoelectronics Programs

Published

Author(s)

Stephen Knight, Joaquin (. Martinez, Michele L. Buckley

Abstract

The microelectornics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST) is fulfilling its mission to strengthening the U.S. economy, works with industry to develop and apply technology, measurements, and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
Citation
NIST Interagency/Internal Report (NISTIR) - 1534
Report Number
1534

Keywords

interconnect and packaging, lithography, microelectronics, modeling, semiconductor, thin film, wafer characterization

Citation

Knight, S. , Martinez, J. and Buckley, M. (2004), Semiconductor Microelectronics and Nanoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31734 (Accessed April 16, 2024)
Created June 30, 2004, Updated October 12, 2021