@misc{769586,
  author = {Stephen Knight and Joaquin Martinez and Michele Buckley},
  title = {Semiconductor Microelectronics and Nanoelectronics Programs},
  year = {2004},
  month = {2004-07-01 00:07:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31734},
  language = {en},
}