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Semiconductor Microelectornics and Nanoelectronics Programs

Published

Author(s)

Stephen Knight, Joaquin (. Martinez, Michele L. Buckley

Abstract

The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST), in fulfillings its mission of strenghtening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and ints infrasturture. This report describes the many projects being conducted at NIST the constitute that effort.
Citation
NIST Interagency/Internal Report (NISTIR) - 7321
Report Number
7321

Keywords

interconnect and packaging, lithography, microelectronics, modeling, semiconductor, thin film, wafer characterization

Citation

Knight, S. , Martinez, J. and Buckley, M. (2006), Semiconductor Microelectornics and Nanoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7321, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32371 (Accessed December 4, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 4, 2006, Updated October 12, 2021